JPH0517797Y2 - - Google Patents
Info
- Publication number
- JPH0517797Y2 JPH0517797Y2 JP19678087U JP19678087U JPH0517797Y2 JP H0517797 Y2 JPH0517797 Y2 JP H0517797Y2 JP 19678087 U JP19678087 U JP 19678087U JP 19678087 U JP19678087 U JP 19678087U JP H0517797 Y2 JPH0517797 Y2 JP H0517797Y2
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- electrodes
- electrode
- present
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012212 insulator Substances 0.000 claims description 28
- 239000002245 particle Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19678087U JPH0517797Y2 (en]) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19678087U JPH0517797Y2 (en]) | 1987-12-25 | 1987-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01100359U JPH01100359U (en]) | 1989-07-05 |
| JPH0517797Y2 true JPH0517797Y2 (en]) | 1993-05-12 |
Family
ID=31487375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19678087U Expired - Lifetime JPH0517797Y2 (en]) | 1987-12-25 | 1987-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517797Y2 (en]) |
-
1987
- 1987-12-25 JP JP19678087U patent/JPH0517797Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01100359U (en]) | 1989-07-05 |
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